Taylor, G G., et al, ‘Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires’, Appl. Phys. Lett. 118, 191106 (2021). DOI: https://doi.org/10.1063/5.0048799
We report on the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned into 100 nm meanders, and characterized at 2.5 K. We verify single-photon sensitivity from 1310 to 2006 nm with saturated response at shorter wavelengths.
